Atomic layer deposition for hard nanocoatings
vastutusandmed
Taivo Jõgiaas, ..., Lauri Kollo, ... Irina Hussainova, ... [et al.]
allikas
Baltic ALD 2014 : 12th International Baltic Conference on Atomic Layer Deposition : May 12-13, 2014, Helsinki, Finland
ilmumiskoht
[S.l.]
ilmumisaasta
leheküljed
p. 91-92
konverentsi nimetus, aeg
12th International Baltic Conference on Atomic Layer Deposition, May 12-13, 2014
konverentsi toimumispaik
Helsinki, Finland
TTÜ struktuuriüksus
keel
inglise
Jõgiaas, T., Kollo, L., Hussainova, I. et al. Atomic layer deposition for hard nanocoatings // Baltic ALD 2014 : 12th International Baltic Conference on Atomic Layer Deposition : May 12-13, 2014, Helsinki, Finland. [S.l.], 2014. p. 91-92.