Atomic layer deposition for hard nanocoatings
statement of authorship
Taivo Jõgiaas, ..., Lauri Kollo, ... Irina Hussainova, ... [et al.]
source
Baltic ALD 2014 : 12th International Baltic Conference on Atomic Layer Deposition : May 12-13, 2014, Helsinki, Finland
location of publication
[S.l.]
year of publication
pages
p. 91-92
conference name, date
12th International Baltic Conference on Atomic Layer Deposition, May 12-13, 2014
conference location
Helsinki, Finland
TTÜ department
language
inglise
Jõgiaas, T., Kollo, L., Hussainova, I. et al. Atomic layer deposition for hard nanocoatings // Baltic ALD 2014 : 12th International Baltic Conference on Atomic Layer Deposition : May 12-13, 2014, Helsinki, Finland. [S.l.], 2014. p. 91-92.