Process development for 3D laser lithography
autor
vastutusandmed
N. Kaste, A. Filbert, U. Mescheder, T. Rang & G. Rang
allikas
High performance and optimum design of structures and materials
ilmumiskoht
Southampton
kirjastus/väljaandja
ilmumisaasta
leheküljed
p. 139-150 : ill
seeria-sari
WIT transactions on the built environment ; 137
konverentsi nimetus, aeg
7th International Conference on High Performance and Optimum Design of Structures and Materials (HPSM)
konverentsi toimumispaik
Ostend, Belgium
ISSN
1746-4498
ISBN
978-1-84564-774-2
märkused
Bibliogr.: 6 ref
TTÜ struktuuriüksus
keel
inglise
märksõna
võtmesõna
MEMS
greyscale
direct laser writing
3D photolithography
tactile sensor
medical application
Kaste, N., Filbert, A., Mescheder, U., Rang, T, Rang, G. Process development for 3D laser lithography // High performance and optimum design of structures and materials. Southampton : WIT Press, 2014. p. 139-150 : ill. (WIT transactions on the built environment ; 137).