Comparative ellipsometric and ion beam analytical studies on ion beam crystallized silicon implanted with Zn and Pb ions
vastutusandmed
Tivador Lohner, Christo Angelov and Valdek Mikli
allikas
ajakirja aastakäik number kuu
516
ilmumisaasta
leheküljed
22, p. 8009-8012
ISSN
0040-6090
Lohner, T., Angelov, C., Mikli, V. Comparative ellipsometric and ion beam analytical studies on ion beam crystallized silicon implanted with Zn and Pb ions // Thin solid films (2008) 516, 22, p. 8009-8012.