Growth dynamics of nanocrystalline diamond films produced by microwave plasma enhanced chemical vapor deposition in methane/hydrogen/air mixture : scaling analysis of surface morphology
autor
Buijnsters, J. G.
vastutusandmed
V. Podgursky, A. Bogatov, V. Sedov, I. Sildos, A. Mere, M. Viljus, J.G. Buijnsters, V. Ralchenko
allikas
ajakirja aastakäik number kuu
Vol. 58
ilmumisaasta
leheküljed
p. 172-179 : ill
ISSN
0925-9635
märkused
Bibliogr.: 26 ref
TTÜ struktuuriüksus
keel
inglise
Podgurski, V., Bogatov, A., Sedov, V., Sildos, I., Mere, A., Viljus, M., Buijnsters, J., Ralchenko, V. Growth dynamics of nanocrystalline diamond films produced by microwave plasma enhanced chemical vapor deposition in methane/hydrogen/air mixture : scaling analysis of surface morphology // Diamond and related materials (2015) Vol. 58, p. 172-179 : ill.