Interaction between point defects, extended defects and impurities in the Si-SiO2 system during the process of its formation

vastutusandmed
D.Kropman, T.Kärner, U.Abru, Ü.Ugaste, E.Mellikov, M.Kauk
ajakirja aastakäik number kuu
114-115
ilmumisaasta
leheküljed
p. 295-298 : ill
ISSN
0921-5107
märkused
Bibliogr.: 10 ref
Kropman, D., Kärner, T., Abru, U., Ugaste, Ü., Mellikov, E., Kauk, M.* Interaction between point defects, extended defects and impurities in the Si-SiO2 system during the process of its formation // Materials science and engineering : B (2004) 114-115, p. 295-298 : ill.