Study of surface defects in 4H-SiC Schottky diodes using a scanning Kelvin probe

vastutusandmed
J. Mizsei, O. Korolkov, J. Toompuu, V. Mikli and T. Rang
allikas
Silicon Carbide and Related Materials 2012 : selected peer reviewed papers from the 9th European Conference on Silicon Carbide and Related Materials (ECSCRM 2012), September 2-6, 2012, St. Petersburg, Russian Federation
ilmumiskoht
Durnten-Zurich
kirjastus/väljaandja
ilmumisaasta
leheküljed
p. 677-680 : ill
seeria-sari
Materials science forum ; 740-742
konverentsi nimetus, aeg
9th European Conference on Silicon Carbide and Related Materials, 2-6 September, 2012
konverentsi toimumispaik
St. Petersburg, Russian Federation
võtmesõna
Kelvin probe method
SEM investigations
ISSN
0255-5476
ISBN
978-3-03785-624-6
märkused
Bibliogr.: 4 ref
keel
inglise
Mizsei, J., Korolkov, O., Toompuu, J., Mikli, V., Rang, T. Study of surface defects in 4H-SiC Schottky diodes using a scanning Kelvin probe // Silicon Carbide and Related Materials 2012 : selected peer reviewed papers from the 9th European Conference on Silicon Carbide and Related Materials (ECSCRM 2012), September 2-6, 2012, St. Petersburg, Russian Federation. Durnten-Zurich : Trans Tech Publications, 2013. p. 677-680 : ill. (Materials science forum ; 740-742).